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Nanometric Linear Actuator

The MPS Nanometric Linear Actuator is a high-force positioning system engineered for applications requiring sub-micron precision. It utilizes a stepper motor paired with a lead screw and a flexure-based mechanism to achieve fine incremental motion without the friction or wear associated with traditional bearings.

Core features:

  • High force density: Delivers up to 500 N of drive force within a 75 x 55 x 32 footprint.
  • Precision motion: Minimum incremental motion of 0.05 µm with a travel range of 100 µm.
  • Cleanroom compatibility: The flexure element design eliminates the need for lubricants, making it suitable for sensitive environments.
  • System integration: Includes an optical barrier for homing references and operates in an open-loop regulation.

Technical specifications

Travel range

+/- 100 μm

Maximum velocity, unloaded

1.4 mm/s

Drive force

500 N

Unidirectional repeatability (open loop)

1 μm

Minimum incremental motion

0.05 μm

Dimensions

75 (L) x 55 (W) x 32 (H) mm

Motor type Stepper
Motor regulation Open loop
Drive mechanism Lead screw
Homing reference Optical barrier


Platform technology

MPS Microsystems' technology is based on modular actuation platforms for precise lens positioning along different axes: axial (Z-axis), lateral (X and/or Y-axis), rotational (tip-tilt), or a combination of these. Each customer-specific solution is a scaled adaptation of our core technological platform, significantly reducing development time and costs.

To meet our clients' requirements, the following components can be customized:

• Selection of motor according to frequency, speed and acceleration requirements
• Ball screw or cam design and choice of ball bearings according to the required stroke
• Type of encoder and controller to match the required resolution
• Dimensional adaptations for a perfect match with the optical design. 
• Adapters for precise positioning of fixed lenses. 
• Bellows for high cleanliness


Get in touch with us!

South Korea

Moosueok Son

Sales Manager South Korea

E-mail

 

Europe

Eugen Bärwald

Business Development Europe

+49 151 217 812 05

E-mail

 

 

North America

Grégoire Bagnoud

Business Development Director

+41 79 286 38 55

E-mail

 


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