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Nanometric Linear Actuator

The MPS Nanometric Linear Actuator is a high-force positioning system engineered for applications requiring sub-micron precision. It utilizes a stepper motor paired with a lead screw and a flexure-based mechanism to achieve fine incremental motion without the friction or wear associated with traditional bearings.

Core features:

  • High force density: Delivers up to 500 N of drive force within a 75 x 55 x 32 footprint.
  • Precision motion: Minimum incremental motion of 0.05 µm with a travel range of 100 µm.
  • Cleanroom compatibility: The flexure element design eliminates the need for lubricants, making it suitable for sensitive environments.
  • System integration: Includes an optical barrier for homing references and operates in an open-loop regulation.

Technical specifications

Travel range

+/- 100 μm

Maximum velocity, unloaded

1.4 mm/s

Drive force

500 N

Unidirectional repeatability (open loop)

1 μm

Minimum incremental motion

0.05 μm

Dimensions

75 (L) x 55 (W) x 32 (H) mm

Motor type Stepper
Motor regulation Open loop
Drive mechanism Lead screw
Homing reference Optical barrier
Nanometric Linear Actuator

Download

  • MPS products for optics & photonics
    PDF
  • Datasheet 
    PDF


Platform technology

MPS Microsystems' technology is based on modular actuation platforms for precise lens positioning along different axes: axial (Z-axis), lateral (X and/or Y-axis), rotational (tip-tilt), or a combination of these. Each customer-specific solution is a scaled adaptation of our core technological platform, significantly reducing development time and costs.

To meet our clients' requirements, the following components can be customized:

• Selection of motor according to frequency, speed and acceleration requirements
• Ball screw or cam design and choice of ball bearings according to the required stroke
• Type of encoder and controller to match the required resolution
• Dimensional adaptations for a perfect match with the optical design. 
• Adapters for precise positioning of fixed lenses. 
• Bellows for high cleanliness


Get in touch with us!

South Korea

Moosueok Son

Sales Manager South Korea

E-mail

 

Europe

Eugen Bärwald

Business Development Europe

+49 151 217 812 05

E-mail

 

 

North America

Grégoire Bagnoud

Business Development Director

+41 79 286 38 55

E-mail

 


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