MPS Microsystems develops advanced components and systems for various demanding applications in the field of semiconductor. Our expertise in manufacturing, assembly, and cleanliness makes our solutions indispensable assets in our customers' semiconductor inspection and wafer processing equipment.
We manage complex projects from concept to mass production and work with our extensive network of reputable partners to deliver systems that push the boundaries of what is possible. This enables us to provide customized solutions that stand out for their precision, dynamism, and cleanliness.
For wafer lift and pedestal alignment, MPS develops the mechanism, actuation and position feedback as a coordinated motion subsystem.
The design accounts for payload, travel and positioning requirements within the available space. Particular attention goes to the parts exposed to vacuum or temperature changes, and to the mechanical and control interfaces with the tool.
Our work on multilayer magnetic-lens assemblies brings together precision manufacturing and clean micro-assembly for semiconductor inspection. We apply that experience to component and assembly requirements in and around electron-beam columns. The scope can cover manufacturing to your drawings or developing the processes needed to achieve the required geometry and cleanliness.
Our coaxial and voice-coil platforms provide a strong base for custom lens-positioning subsystems in semiconductor inspection and metrology heads.
Your optical layout and moving mass guide the choice of mechanism. We develop the guidance, drive and feedback around the required travel and settling time, with particular attention to unwanted lateral or angular movement.
Our precision machining and finishing capabilities are available for wafer processing chamber parts with close-tolerance interfaces or demanding surface requirements like showerhead plates.
Starting from your drawing or component requirement, we review the geometry, materials and process exposure to establish a suitable production route.
Over the years, we have built up a large network of academic partners with whom we collaborate to develop state-of-the-art solutions.
• PSI - Paul Scherrer Institute
• EPFL - École Polytechnique Fédérale Lausanne
• ETHZ - Eidgenössische technische Hochschule Zürich
• HES-SO - Haute école supérieure de Suisse occidentale
• OST - Ostschweizer Hochschule
• University of Berne
• CSEM - Centre Suisse d'Électronique et de Microtechnique
• EMPA - Swiss Federal Laboratories for Materials Testing and Research
