Touch probe for very high accuracy measurement

Tactile probe

Expert in linear bearings, MPS Microsystems has developed this tactile probe to meet the specific needs of a measuring instrument manufacturer. To guarantee measurement accuracy of 10 nm, MPS Microsystems has developed a zero friction and zero backlash technology, by relying on its in-house skills in machining, precision assembly, material selection and surface treatments.


  • Several probe sizes with strokes between 1 and 4 mm
  • Tactile probe for the accurate measurement of surfaces
  • Low friction, anti-rotation pin
  • Controlled radial play
  • Oil-free


  • Application catalogue
  • Product catalogue

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